| 参数 | Specifications | 技术指标 Technique data |
| 测量范围 | Measurement range | 1mm、5mm、12mm |
| 响应频率 | Response frequency | <10hz<> |
| 系统精度 | System accuracy | ±1μm |
| 重复精度 | Repeatability accuracy | 1个分辨率LBS |
| 分辨率 | Resolution | 最小0.1μm |
| 工作环境温度 | Working environment temperature | -10～+55℃ |
| 额定工作电压 | Rated working voltage | 3.6～14V |
| 电功耗 | Power consumption | ≤0.5W |
| 最大工作电流 | Maximum operating current | ≤0.5mA |
| 机械驱动 | Mechanical drive | 测量长度5mm：向下安装时0.1N~0.9N；横向安装时 0.15N~0.95N；向上安装时0.2N~1N 测量长度12mm：向下安装时0.1N~0.9N；横向安装时 0.15N~0.95N；向上安装时0.2N~1N 测量长度30mm：向下安装时0.6N~1.5N；横向安装时 0.9N~1.8N；向上安装时1.2N~2.1N |
| 输出形式 | Output format | RS485、Ethernet、Ethercat、RS-232C、USB、SSI、BISS |
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